Conference Program
 
NANOSTRUCTURE FABRICATION

June 21-26, 1998
Tilton School
Tilton, NH

Chair:
John N. Randall

Vice Chair:
Christie R. Marrian

Visit the Chair's Conference Page for more information.

Sun Eve: ATOM LITHOGRAPHY - Putting Atoms Where You Want Them
Discussion Leader: Margaret Stern
Mara Prentiss - Harvard “Atom lithography”
Junichi Fujita - NEC Fundamental Res. Labs

“Atomic beam holography for future nanofabrication”
Mon Morn: MESSING WITH MOLECULES - Identification and construction
Discussion Leader: Wiley Kirk
Toshihiko Kanayama -JRCAT "Mass Selective Ion Traps for Molecular construction"
Thomas Jung - Paul Scherer Institute “Molecular Nanotechnology? Lots of Nanoscience with Increasing Relevance for Technology”
Paul Hansma - UCSB "DNA structural Identification with STM"

Mon Eve: NEXT GENERATION LITHOGRAPHY WITH ELECTRONS AND IONS
Discussion Leader: Jack Wolfe
John Melngailis - University of Maryland “Ion Projection Lithography”
J. Alex Liddle - Lucent “Projection Electron Beam Lithography"

Tue Morn: NEXT GENERATION LITHOGRAPHY WITH: DUV, EUV, AND XRAYS
Discussion Leader: Christie Marrian
Steve Brueck - Univ. of New Mexico “Imaging Interferometric Lithography - A Novel Approach to Nanoscale Lithography”
Greg Cardinale - Sandia National Labs “EUV Lithography”
Marty Peckerar - Naval Research Labs “X-RAY Lithography"

Tue Eve: NEXT GENERATION LITHOGRAPHY MASKS? OR MASKLESS?
Discussion Leader: Doug Van Den Broeke
Roxanne Engelstad - Univ. of Wisconsin “Modelling of Membrane Masks”
Dieter Kern Univ. of Tübingen

“Microcolumn e-beam Lithography”
Wed Morn: DNA COMPUTING TECHNOLOGY
Discussion Leader: Terry Fountain
Ned Seeman - NYU “DNA Nanotechnology”
Erik Winfree - Cal Tech “Algorithmic Self-Assembly of DNA”
John Rief - Duke Univ. “ DNA Nano-Assemblies for Biomolecular Computation”

Wed Eve: NANO ELECTRONICS
Discussion Leader: Dean Collins
Steve Chou - Princeton “Nanoimprint lithography and nanoelectronic applications”
Bobby Brar - Raytheon TI “Resonant tunneling devices and circuits"

Thur Morn: MICRO ELECTRO MECHANICAL SYSTEMS
Discussion Leader: Rebecca Cheung
Tsen-Hwang Lin - Texas Instruments "Micromachining in RF, Photonic and Data Storage Applications"
Dave Bishop - Lucent "Silicon Micromechanics for Science and Technology"
Tom Kenney - Stanford "Recent Activities in the MEMS Community"

Thur Eve: PLENARY SESSION
Discussion Leader: John Randall
A short video on the work of Tom Ray "Evolution in an alternative universe"
Harold Craighead - Cornell "Nano and Micro Fabrication for Non-IC Applications"

Last Updated: May 22, 2006