Conference Program
 
PLASMA PROCESSING SCIENCE

July 21-26, 2002
Tilton School
Tilton, NH

Chair:
Javad Mostaghimi

Vice Chair:
Mark J. Kushner

Sunday, July21
2:00 pm - 9:00 pmArrival and check-in
6:00 pmDinner
7:30-9:10 pmMEMS: Plasmas for Fabrication and Function
Discussion Leader: C. Liu (US)
7:30-8:20 pm S. Pang (University of Michigan, US)
Plasma Processing for High Performance Micro-Electromechanical Systems (MEMS)
8:20-9:10 pm Y. Gianchandani (University of Michigan, US)
Micro Plasmas for Semiconductor Processing and Other Applications
Monday, July 22
7:30-8:30Breakfast
8:30Conference photo
8:45-12:25Plasmas for Adding Materials to Surfaces: Deposition and Coatings
Discussion Leader: F. Gitzhofer (University of Sherbrooke, Canada)
8:45-9:35T. Yoshida (University of Tokyo, Japan)
Characteristics of Hybrid Plasma Spray Processing
9:35-10:25C. Moreau (National Research Council, Canada)
Monitoring of Particle Impacts in Plasma Spray Conditions
10:25-10:45Break
10:45-11:35P. Grant (Oxford University, UK)
Vacuum Plasma Spray Forming
11:35-12:25E. Bouyer (German Aerospace Centre, Germany)
Plasma Synthesis and Deposition of Ceramic Materials from Liquid Precursors.
12:30 pmLunch
1:30 pm - 6:00 pmFree Time
6:00 pmDinner
7:30-9:30 p.m.Poster Session I
Chair: David Graves (Berkeley, USA)
Tuesday, July 23
7:30-8:30Breakfast
8:45-10:25Plasmas for Removing Materials from Surfaces: Etching, Sputtering and Surface Modification
Discussion Leader: J. Chang (US)
8:45-9:35O. Joubert (LTM/CNRS, France)
Gate Patterning for Ultimate CMOS Device Fabrication
9:35-10:25E. Kessels (Eindhoven University of Technology, Netherlands)
Surface Science Aspects of Plasma Deposition
10:25-10:45Break
10:45-12:25Getting Smaller: Applications of Plasmas in Nanotechnology
Discussion Leader: V. Ayres (US)
10:45-11:35L. Boufendi (University of Orleans, France)
Silicon Nanocrystallites Nucleation and Growth and Applications in Nanostructured Thin Layers Deposition and Single-Electron Devices
11:35-12:25O. Takai (Nagoya University, Japan)
Plasma Processing For Biomimetic Materials
12:30 pmLunch
1:30 pm - 6:00 pmFree Time
6:00 pmDinner
7:30-9:10Plasmas in the Atmosphere: Environmental Applications and Combustion
Discussion Leader: G. Schiller (German Aerospace Centre, Germany)
7:30-8:20M. Gundersen (USC, US)
Transient Plasmas for Plasma Aided Combustion and Flame Ignition
8:20-9:10F. Massines (Paul Sabatier University, France)
Physics and Chemistry in Glow Dielectric Barrier Discharges for Surface Treatment
Wednesday, July 24
7:30-8:30 Breakfast
9:00-12:00Photons from Plasmas
Discussion Leader: D. Wharmby (UK)
9:00-9:50R. Boswell (Autralian National University, Australia)
Plasma Processing in Photonics
9:50-10:20Break
10:20-11:10M. Neiger (University of Karlsruhe, Germany)
Discharge Behaviour and Examples of Applications for Dielectric Barrier Discharges
11:10-12:00J. Lee (Pohang University of Science and Technology, Korea)
Advanced Three-Dimensional Particle and Fluid Simulations for Plasma Display and Etching
12:30 pmLunch
1:30 pm - 4:00 pmFree Time
4:00 pm - 6:00 pmPoster Session II
Chair: Mark J. Kushner (Illinois, US)
6:00 pmDinner
7:00-9:30Plasma Devices
Discussion Leader: A. Fridman (University of Illinois, Chicago)
7:00-7:50K. Landes (University of Munich, Germany)
New Types of DC-Plasma Generators
7:50-8:40J. Hopwood (Northeastern University, US)
Microfabricated ICP Discharges
8:40-9:30N. Hussary (University of Minnesota, US)
Understanding The Wire Arc Spray Process
Thursday, July 25
7:30-8:30Breakfast
9:00-12:00Biotechnology & Health Care: A Role for Plasmas
Discussion Leader: C. Berndt (SUNY at Stony Brook, US)
9:00-9:50R. Hicks (UCLA, US)
Non-Equilibrium Atmospheric Pressure Plasmas for Surface Treatment
9:50-10:20Break
10:20-11:10Y. Horiike (University of Tokyo, Japan)
Bio-chips Fabrication Employing Plasma Chemistry
11:10-12:00P. Fabia (University of Bari, Italy)
Microstructureing Biomedical Polymers by means of Plasma Processes
12:30 pmLunch
1:30 pm - 6:00 pmFree Time
6:00 pmDinner
7:30-9:10Plasmas for Material Production in the Gas Phase: Nucleation and Growth
Discussion Leader: Van de Sanden (Eindhoven, Netherlands)
7:30-8:20S. Girshick (University of Minnesota, US)
Computational Modeling of Particle Nucleation in Silane Plasmas
8:20-9:10R.J. Munz (McGill University, Canada)
The Transferred Arc Approach To Nanoparticles: Advantages, Limitations And The Future
Friday, July 26
7:30 am - 8:30 amBreakfast
9:00 am Bus Departs for Logan Airport

Last Updated: May 4, 2006